2021-08-17 | Thermodynamics of Atomic Layer Etching Chemistry on Copper and Nickel Surfaces from First Principles – Chem. Mater. Yantao Xia and Philippe Sautet*.
2021-08-17 | Thermodynamics of Atomic Layer Etching Chemistry on Copper and Nickel Surfaces from First Principles – Chem. Mater. Yantao Xia and Philippe Sautet*.